Analysis and design principles of MEMS devices /
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...
| Основен автор: | Bao, Min-Hang. |
|---|---|
| Формат: | Електронна книга |
| Език: | English |
| Публикувано: |
Amsterdam ; Boston ; London :
Elsevier,
2005.
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| Предмети: | |
| Онлайн достъп: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=166279 |
| Подобни документи: |
Print version::
Analysis and design principles of MEMS devices. |
Съдържание:
- Chapter 1. Introduction to MEMS devices
- Chapter 2. Basic mechanics of beam and diaphragm structures
- Chapter 3. Air Damping
- Chapter 4. Electrostatic Actuation
- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
- Chapter 6. Piezoresistive Sensing.