Laser cleaning optical physics, applied physics and materials science /
Laser cleaning is very important for modern high technology. It is used, or considered for use in the fabrication of printed circuit boards, in the production of dynamic random access memory (DRAM), in lithography and epitaxial growth, for the removal of contaminations during via-hole production, an...
Автор-организации: | International Workshop on Laser Cleaning Singapore) |
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Други автори: | Luk£iı̐aı̐Łnchuk, B. S. |
Формат: | Електронен |
Език: | English |
Публикувано: |
River Edge, N.J. :
World Scientific,
℗♭2002.
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Предмети: | |
Онлайн достъп: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=514284 |
Подобни документи: |
Print version::
Laser cleaning. |
Резюме: |
Laser cleaning is very important for modern high technology. It is used, or considered for use in the fabrication of printed circuit boards, in the production of dynamic random access memory (DRAM), in lithography and epitaxial growth, for the removal of contaminations during via-hole production, and for the cleaning of micro-optical and micro-mechanical components. This invaluable book presents the mechanics of the cleaning processes, experimental results, and different applications, including laser cleaning of art. It contains review articles by leading specialists in laser cleaning who participated in the 1st International Workshop on Laser Cleaning, held in Singapore in 2001. |
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Описание на библ. документ: |
Review papers of the participants of the First International Workshop on Laser Cleaning held in Singapore in 2001. |
Физически характеристики: |
1 online resource (xiv, 466 pages) : illustrations |
Библиография: |
Includes bibliographical references and index. |
ISBN: |
9789812777515 9812777512 |