Micro-nano technology XIII selected, peer reviewed papers from the13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China /
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and...
| Автор-организации: | Zhongguo wei mi na mi ji shu xue hui. Conference |
|---|---|
| Други автори: | Wang, Xiaohao. |
| Формат: | Електронен |
| Език: | English |
| Публикувано: |
Stafa-Zurich ; Enfield, NH :
Trans Tech Publications,
2012.
|
| Серия: |
Key engineering materials ;
v. 503. |
| Предмети: | |
| Онлайн достъп: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=517147 |
| Подобни документи: |
Print version::
Micro-nano technology XIII. |
Съдържание:
- Micro-Nano Technology XIII; Preface; Table of Contents; Chapter 1: Micro/Nano Transducer/Actuator/Robot; The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid; A Monolithic Integrated Pressure Sensor; A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope; Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports; Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror; Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane.
- New Isolation Optimization Method of RF MEMS Capacitive SwitchesDesign, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors; MEMS Grating with Interdigitated-Comb Structure; Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor; Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes; Optimal Design of Micro Plastic Heat Radiator; A Miniaturized Piezoelectric Wind Flutter Generator; Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS.
- A Flush-Mounted Resonant Ice Detection Sensor with High SensitivitySimulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers; Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology; Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films; Heating Carve Technique for Polymer Microfluidic Microchannel; Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness; MEMS Bionic Vector Hydrophone.
- Vibration Characteristic Analysis of V-Shaped Electrothermal MicroactuatorDesign and Analysis of a Monolithic 3-Axis Micro-Accelerometer; An Interface for Low-Q Micromachined Gyroscope; A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer; Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide; A Simple Method for Depositing DNA on the Mica; A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution.
- Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical GyroAnalysis and Improvement of a 3 Axis Accelerometer; A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror; Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes; Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope; Design and Simulation of Multi-Microchannel for Thermal Wind Sensor; Study of High Sensitivity Sensor Based on the Principle of Photoionization.