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Gettering and defect engineering in semiconductor technology XIII GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Do˜lnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009 /

This collection aims to address the fundamental aspects, as well as the technological problems, which are associated with defects in electronic materials and devices. The volume comprises 93 contributions; among them, 14 invited papers, from more than 20 different countries. The invited papers, subm...

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Автор-организации: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" Do˜lnsee-Schorfheide, Germany)
Други автори: Kittler, Martin., Richter, H., 1940-
Формат: Електронен
Език: English
Публикувано: Stafa-Zuerich, Switzerland : Trans Tech Publications, ℗♭2010.
Серия: Diffusion and defect data. Solid state phenomena ; v. 156/158.
Предмети:
Онлайн достъп: http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=503559
Подобни документи: Print version:: Gettering and defect engineering in semiconductor technology XIII.