Fabrication of GaAs devices /
This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...
| Основен автор: | Baca, A. G. |
|---|---|
| Автор-организации: | Institution of Electrical Engineers. |
| Други автори: | Ashby, Carol Iris Hill, 1953- |
| Формат: | Електронна книга |
| Език: | English |
| Публикувано: |
London :
Institution of Electrical Engineers,
℗♭2005.
|
| Серия: |
EMIS processing series ;
no. 6. |
| Предмети: | |
| Онлайн достъп: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=292236 |
| Подобни документи: |
Print version::
Fabrication of GaAs devices. |
| Резюме: |
This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. |
|---|---|
| Физически характеристики: |
1 online resource (xvii, 350 pages) : illustrations. |
| Библиография: |
Includes bibliographical references and index. |
| ISBN: |
9781849190688 1849190682 |