Ultra clean processing of semiconductor surfaces X selected, peer reviewed papers from the 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 20-22, 2010, Ostend, Belgium /
The International Symposium on Ultra-Clean Processing of Semiconductor Surfaces (UCPSS) is a bi-annual conference which has been organized by IMEC since 1992. The scope of the symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrate...
| Автор-организации: | International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ostend, Belgium) |
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| Други автори: | Mertens, Paul., Meuris, Marc., Heyns, Marc. |
| Формат: | Електронен |
| Език: | English |
| Публикувано: |
Durnten-Zurich, Switzerland :
TTP,
℗♭2012.
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| Серия: |
Diffusion and defect data. Solid state phenomena ;
v. 187. |
| Предмети: | |
| Онлайн достъп: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=517190 |
| Подобни документи: |
Print version::
Ultra clean processing of semiconductor surfaces X. |
| Онлайн достъп от Библиотека ”Паница” на Американския университет в България: |
http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=517190 |
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| Провери в Paniza Library, AUBG | Сигнатура: |
QD543 |
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